Article ID Journal Published Year Pages File Type
10669825 Thin Solid Films 2012 7 Pages PDF
Abstract
► Ti doped DLC films (Ti ~ 24 at.% )were deposited by a hybrid ion beam system. ► Solubility of the Ti atoms in the DLC films was found around 7 ~ 13 at .%. ► Microstructure evolution from DLC to nanocomposite played key role in film behaviors.
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Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method
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