Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10669828 | Thin Solid Films | 2012 | 13 Pages |
Abstract
âºInvestigation of transient stages during chemical vapour deposition of SiC. âºCorrelation with gas phase composition and deposition rate. âºCorrelation with nature of gradient Si-C coatings (ÏTr). âºSynthesis of SiC/ÏTr/SiC bilayers. âºAdhesion assessment of SiC/ÏTr/SiC bilayers.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Georges Chollon, Francis Langlais, Maud Placide, Patrick Weisbecker,