Article ID Journal Published Year Pages File Type
10669835 Thin Solid Films 2012 6 Pages PDF
Abstract
► High quality VO2 films with different phase structures were obtained by PLD method. ► High oxygen pressure tends to form B-VO2 while low pressure favors M1-VO2 film. ► φ-scan XRD confirms the [020] epitaxial growth orientation of the M1-VO2 film. ► The epitaxial relationship is explained based on domain matching theory. ► M1-VO2 film shows excellent optical property in infrared range.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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