Article ID Journal Published Year Pages File Type
10669839 Thin Solid Films 2012 8 Pages PDF
Abstract
►Cubic erbium trihydride thin films produced by ion beam sputter deposition. ►Face-centered cubic metal sub-lattice verified by X-ray and electron diffraction. ►Composition evaluated using four different techniques. ►Film stress monitored during deposition. ►Formation of cubic erbium trihydride attributed to a large, in-plane film stress.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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