| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669846 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Films of (Al1.5CrNb0.5Si0.5Ti)Nx were prepared by reactive magnetron sputtering. ⺠Effect of substrate bias on films structure and mechanical properties was studied. ⺠A 200% of hardness increase was found by increasing the substrate bias. ⺠The mechanisms of hardness enhancement were discussed and clarified in this study.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Wan-Jui Shen, Ming-Hung Tsai, Yee-Shyi Chang, Jien-Wei Yeh,