Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10669848 | Thin Solid Films | 2012 | 5 Pages |
Abstract
⺠Effect of thermal annealing on the microstructure of erbium film was investigated. ⺠Grain size of erbium film is enlarged by annealing processing. ⺠Annealing processing will relax the film stress and produce cracks on film surface. ⺠The crystalline structure of erbium is affected by the annealing processing.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
H.H. Shen, S.M. Peng, X.G. Long, X.S. Zhou, L. Yang, K. Sun, X.T. Zu,