| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669883 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Si films prepared by catalytic chemical vapor deposition. ⺠Carbonized Ta with a TaC surface layer used as catalyst. ⺠TaC surface structure preserved after long-term use in a wide temperature range. ⺠Help to solve the ageing problem of metal catalysts. ⺠Si film obtained has a similar crystal structure to that prepared by Ta catalyst.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shimin Cheng, Huiping Gao, Tong Ren, Pinliang Ying, Can Li,