Article ID Journal Published Year Pages File Type
10669891 Thin Solid Films 2012 7 Pages PDF
Abstract
► TiO2 films are deposited on glass at 25 °C by successive ionic layer adsorption and reaction method with a rate of 4.6 Å/cycle. ► The films nucleate in an island mode initially but grow in a layer mode afterwards. ► The SILAR TiO2 films nucleation period is five cycles. ► Electron paramagnetic resonance spectroscopy shows that TiO2 films paramagnetic defects are attributed to oxygen vacancies. ► They will decrease by anneal or ultraviolet radiation and form hydroxyl or superoxide radicals.
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Physical Sciences and Engineering Materials Science Nanotechnology
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