| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669898 | Thin Solid Films | 2012 | 4 Pages |
Abstract
⺠Nitrogen is physisorbed on the target while hydrogen and oxygen are chemisorbed. ⺠Highly reactive plasmas can provoke undesired gas-phase reactions. ⺠A getter effect is observed due to Y deposited on the internal walls of the chamber.
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Authors
F. Gontad, A. Lorusso, A. Perrone,