| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669937 | Thin Solid Films | 2012 | 8 Pages |
Abstract
⺠Hillocks can be avoided if Ïan is lower - 28.7 MPa. ⺠The number of hillocks is linearly proportional to the values of Ïan. ⺠Al-film thickness, annealing temperature and annealing time had a significant effect on the Ïan parameter.
Related Topics
Physical Sciences and Engineering
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Authors
Ming Tsung Kao, Jen Fin Lin,