Article ID Journal Published Year Pages File Type
10669938 Thin Solid Films 2012 6 Pages PDF
Abstract
► In0.01Ga0.99As layers were grown on offcut Si substrate using Ge as buffer layer. ► Dislocation density of Ge-on-Si was inverse proportional to thickness square root. ► GaAs islands were observed in the 100 nm region on In0.01Ga0.99As/Ge interface. ► Unintended Ge-doping as low as 1016 cm− 3 was observed in In0.01Ga0.99As layer.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
, , , , , , , , , , , ,