| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669941 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠ZnO/Cu/ZnO films were fabricated from zinc and copper targets by sputtering. ⺠Transmittance reaches maximum when top and bottom ZnO thicknesses are nearly equal. ⺠Sheet resistance increases with increasing ZnO layer thickness. ⺠Variation in sheet resistance with oxygen/argon ratio is due to interface effect.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Xiao-Yu Liu, Ying-Ai Li, Shi Liu, Hong-Lin Wu, Hai-Ning Cui,