Article ID Journal Published Year Pages File Type
10669980 Thin Solid Films 2012 15 Pages PDF
Abstract
Enormous progress has been achieved over the past decade in evaluating the toughness of hard coatings and thin films. This paper reviews methodologies developed based on indentation, bending, and microtensile testing. In addition, we discuss a recent development in fracture toughness measurement which involves the application of macrotension to a substrate in order to induce microtension in a patterned thin film.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
, ,