| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669984 | Thin Solid Films | 2012 | 4 Pages |
Abstract
In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.P. Beardmore, A.J. Palmer, C.G.C.H.M. Fabrie, K.A.H. van Leeuwen, R.T. Sang,