| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670063 | Thin Solid Films | 2012 | 8 Pages |
Abstract
⺠Transparent ITO films made by cold-sputtering; and by spin coating of colloidal ITO. ⺠Characterized with XRD, SEM, AFM, XPS, optical transmission, impedance spectroscopy. ⺠Argon annealing of cold-sputtered films gives lower resistivity than air annealing. ⺠Air annealing of colloidal films decreases resistivity by 8-9 orders of magnitude. ⺠Ar-O2 RIE alone decreases colloidal ITO film resistivity by 4 orders of magnitude.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Salil M. Joshi, Gregory W. Book, Rosario A. Gerhardt,