Article ID Journal Published Year Pages File Type
10670116 Thin Solid Films 2012 6 Pages PDF
Abstract
► CrAlN layers obtained with a (Cr75Al25) target or Cr and Al independent targets. ► Lower friction coefficient and better crystallinity obtained with a sintered target. ► Al content of layers obtained with a sintered target limited and fixed. ► Better tribological properties of layers obtained with two targets. ► No economical, practical and scientific interest to work with a sintered target.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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