Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10670149 | Thin Solid Films | 2011 | 9 Pages |
Abstract
The compositional influence of Cr and Y on the microstructure of MgâCrâO, and MgâYâO films synthesized by reactive magnetron sputtering has been investigated by transmission electron microscopy, X-ray diffraction and molecular dynamics simulations. A decrease in crystallinity is observed in these films as the M (Cr or Y) content is increased. It is found that M forms a solid solution with MgO for metal ratios up to ~Â 70% and ~Â 50% for Cr and Y respectively. Above ~Â 70% Cr metal ratio the MgâCrâO films are found to be completely amorphous. The MgâYâO films are composed of Mg(Y)O and Y2O3 nano crystallites, up to ~Â 50% Y metal ratio. Above this ratio, only Y2O3 nano crystallites are found. The preferential <Â 111> MgO grain alignment is strongly affected by the increase in M content. For M metal ratios up to ~Â 50%, there is a selective promotion of the <Â 100> MgO grain alignments and a decline in the <Â 111> grain alignments.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
N. Jehanathan, V. Georgieva, M. Saraiva, D. Depla, A. Bogaerts, G. Van Tendeloo,