| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670260 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Surface morphology depends on the deposition angle during sputtering. ⺠High quality crystalline ZnO by radio frequency sputtering obtained at 350 °C. ⺠ZnO nanorod-based sensor shows high sensitivity and fast response behavior.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jin Chu, Xiaoyan Peng, M. Sajjad, Boqian Yang, Peter X. Feng,