| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670275 | Thin Solid Films | 2012 | 7 Pages |
Abstract
⺠c-Zr3N4 and c-Zr2ON2 films were sputtered in water vapor and nitrogen atmosphere. ⺠Both materials request additional deposition energy to be synthesized. ⺠Water as oxygen source in N2 atmosphere enhance the energy involved in the process. ⺠The structural properties of both phases were assessed. ⺠Optical properties and chemical composition confirmed structural results.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
A. Rizzo, M.A. Signore, L. Mirenghi, L. Tapfer, E. Piscopiello, E. Salernitano, R. Giorgi,