Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10670304 | Thin Solid Films | 2012 | 7 Pages |
Abstract
⺠We examined the morphology and microstructure of TNAs treated by ELA. ⺠Crystallinity of parallel ELA-treated TNAs reached ~50% of furnace anneal. ⺠Tilted ELA at 85o enhanced the degree of crystallization in TNAs to 90%.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ming-Yi Hsu, Nguyen Van Thang, Chih Wang, Jihperng Leu,