Article ID Journal Published Year Pages File Type
10670352 Thin Solid Films 2011 9 Pages PDF
Abstract
This paper provides an overview of the relationship between optical ellipsometric measurements and nanoscale science. This relationship is discussed by analyzing published papers, patents and nanomaterials investigated in laboratories and constituting commercial products. Specific challenges and needs for advancing ellipsometry exploitation in nanotechnology are also discussed in the frame of nanometrology standardization. The ellipsometric characterization of plasmonic gold nanoparticles supported on a silicon substrate is used as an example to discuss various issues related to the optical characterization of nanomaterials, i.e., the detection of buried interfaces, size effects on the dielectric function and the monitoring in real time of nanoparticles growth.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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