| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670367 | Thin Solid Films | 2011 | 4 Pages |
Abstract
We use azimuthally resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using one- and two-dimensional rigorous coupled-wave methods in order to evaluate the sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Martin Foldyna, Thomas A. Germer, Brent C. Bergner, Ronald G. Dixson,