| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670412 | Thin Solid Films | 2011 | 5 Pages |
Abstract
We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to retardance imaging of strain in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Lars Martin Sandvik Aas, PÃ¥l Gunnar Ellingsen, Morten Kildemo,