| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670416 | Thin Solid Films | 2011 | 4 Pages |
Abstract
A high speed self-corrected algorithm is proposed for the polarization modulated ellipsometry (PME). In this post-flight analysis, we prove that a set of optimized ellipsometric parameters (EPs) can be obtained by using the intensities at 4 specific temporal phases. The correction ability to its initial phase by this technique has been demonstrated through a twisted nematic liquid crystals (TN-LC) cell under the driving of a square wave. Furthermore, the optimal modulation amplitude in obtaining the accurate and precise set of EPs will be discussed in this work.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hsiu-Ming Tsai, Leng-Chun Chen, Yu-Faye Chao,