Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10670528 | Thin Solid Films | 2011 | 7 Pages |
Abstract
Orientation of sp2-bonded boron carbonitride (BCN) hybrid films has been investigated. The films were synthesized on Ni (111) and polycrystalline Ti substrates by radio frequency plasma enhanced chemical vapor deposition using tris-dimethylamino borane as a single-source molecular precursor. The deposition was performed at the radiofrequency power 400-800 W at the working pressure 2.6 Pa. Formation of sp2-BCN hybrids in the samples was confirmed by X-ray diffraction (XRD). In the XRD profile, the peak at 26.3° revealed formation of crystalline phase in the samples in which the lattice planes are separated from each other by around 3.5 Ã
. The D band at ~ 1350 cmâ 1 and the G band at ~ 1570 cmâ 1 in Raman spectra also suggested presence of graphite-like sp2-B-C-N hybrid bonds. The films were composed of different B-N, B-C, and C-N bonds to form sp2-BCN atomic hybrids confirmed by X-ray photoelectron spectra. Orientation and local structures of the films were studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The dominant presence of Ï* and Ï* resonance peaks of the sp2 hybrid orbitals in B K-edge NEXAFS spectra revealed preferred formation of sp2-BCN atomic hybrids around B atoms like-BN3 configuration in respect to the plane of Ni (111) substrate. Different orientations were suggested on the basis of polarization dependence of B K-edge and N K-edge of the NEXAFS spectra.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Md. Abdul Mannan, Yuji Baba, Tetsuya Kida, Masamitsu Nagano, Iwao Shimoyama, Norie Hirao, Hideyuki Noguchi,