Article ID Journal Published Year Pages File Type
10670651 Thin Solid Films 2005 5 Pages PDF
Abstract
Ellipsometric and spectroscopic investigations of Hf1−xZrxO2 thin films were performed. Dispersion dependences of refractive indices and extinction coefficients in the wavelength interval 0.2-0.7 μm were obtained by optical-refractometric synthesis of absorption spectra. Optical-refractometric relation is applied to describe the dispersion of the refractive indices. Compositional behaviour of optical pseudogap and refractive indices of HfO2-ZrO2 thin films is studied.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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