Article ID Journal Published Year Pages File Type
10670661 Thin Solid Films 2005 7 Pages PDF
Abstract
The surface morphology was imaged by atomic force microscopy. The data revealed that the NH3 treatment had caused distinct micro-structural modification on the top layer surface. The size of the nodule aggregates was largely reduced and this contributed to a much better developed top surface.
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Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Infrared spectroscopic ellipsometry and atomic force microscopy study of plasma polymerized hexamethyldisiloxane layers post-treated by NH3 plasma
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