| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10670751 | Thin Solid Films | 2005 | 5 Pages |
Abstract
In order to improve the adhesion between Parylene C and gold, Parylene C was surface-treated using ion-assisted reaction (IAR) before depositing gold at a working pressure of 0.6 mPa. Ar ion irradiation was performed under oxygen gas at a vacuum of 13 mPa. The contact angle of surface-treated Parylene C film on Si decreased significantly and the surface energy increased compared to untreated Parylene C film. These results are attributed to the presence of hydrophilic groups on the Parylene C films surface after modification using IAR. These functional groups were confirmed by X-ray photoelectron spectroscopy analysis on the modified Parylene C film. We confirmed that the adhesion of evaporated gold film on Parylene C improved as a function of ion dose quantities.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.W. Seong, K.W. Kim, Y.W. Beag, S.K. Koh, K.H. Yoon, J.H. Lee,