Height-resolved quantification of microstructure and texture in polycrystalline thin films using TEM orientation mapping

The spatial correlation of the entire data set gives insights into previously unnoticed growth mechanisms such as the presence of renucleation or preferred misorientations. Finally, the data set can be used to guide targeted, local studies by other transmission electron microscopy techniques. This is demonstrated by the site-specific application of nano-beam diffraction to validate the presence of coherent [21¯1¯0]/(011¯3) twin boundaries first suggested by the orientation mapping.