Article ID Journal Published Year Pages File Type
10672516 Ultramicroscopy 2009 7 Pages PDF
Abstract
The effect of the chromatic aberration (Cc) coefficient in a spherical aberration (Cs)- corrected electromagnetic lens on high-resolution high-angle annular dark field (HAADF) scanning transmission electron microscope (STEM) images is explored in detail. A new method for precise determination of the Cc coefficient is demonstrated, requiring measurement of an atomic-resolution one-frame through-focal HAADF STEM image. This method is robust with respect to instrumental drift, sample thickness, all lens parameters except Cc, and experimental noise. It is also demonstrated that semi-quantitative structural analysis on the nanometer scale can be achieved by comparing experimental Cs- corrected HAADF STEM images with their corresponding simulated images when the effects of the Cc coefficient and spatial incoherence are included.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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