| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10672528 | Ultramicroscopy | 2011 | 4 Pages |
Abstract
⺠A NBD system combined with an energy filter and a STEM is proposed. ⺠The system uses a novel numerical processing. ⺠The system has benefits of reducing time and work. ⺠Strain distributions in the channel region of two types of MOSFETs were clarified.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Fumihiko Uesugi, Akira Hokazono, Shiro Takeno,