Article ID Journal Published Year Pages File Type
10672571 Ultramicroscopy 2011 9 Pages PDF
Abstract
► Effect of electron ranges on modeling electron beam induced current is shown. ► A method to extract an electron range for simple form of generation is proposed. ► For uniform generation the EBIC current is independent of the choice of it shape. ► Uses of the extracted electron ranges remove some existing literature ambiguity.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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