Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10672571 | Ultramicroscopy | 2011 | 9 Pages |
Abstract
⺠Effect of electron ranges on modeling electron beam induced current is shown. ⺠A method to extract an electron range for simple form of generation is proposed. ⺠For uniform generation the EBIC current is independent of the choice of it shape. ⺠Uses of the extracted electron ranges remove some existing literature ambiguity.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
A. Lahreche, Y. Beggah, R. Corkish,