| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10672580 | Ultramicroscopy | 2011 | 12 Pages |
Abstract
⺠AFAM technique was used to detect buried structures of well defined geometries. ⺠Detection depth depends on the defect geometry, dimensions and its stiffness. ⺠Maximum detection depth was about 900 nm. ⺠Experimental results were verified by quantitative analysis and FEM simulations.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Andre Striegler, Bernd Koehler, Beatrice Bendjus, Mike Roellig, Malgorzata Kopycinska-Mueller, Norbert Meyendorf,