Charge and charging compensation on oxides and hydroxides in oxygen environmental SEM

Oxygen environment was applied to the scanning electron microscopy (SEM) analysis of insulating samples. In the high vacuum SEM, a local oxygen pressure was provided, and in the environmental SEM, oxygen atmosphere was used instead of water, the commercial mode. The charging effects in the SEM observation and component characterization of samples such as Al2O3, Al(OH)3, Mg(OH)2 and others can be eliminated or significantly reduced. The oxygen environment does not only provide a new approach to releasing the charging difficulty in the analyses using electron beam as a probe, but also provide an insightful hint to the understanding of the charging processes in general.