Effect of tip shape on capacitance determination accuracy in scanning capacitance microscopy

The stray electrostatic field causes large errors, which are exceptionally severe with microfabricated probes. Contrary to general belief, differential measurements, based on modulation of the probe/sample separation or of the width of depletion layer in semiconductors, do not reduce the effect of the stray field significantly. For best results, the probe should be shielded as close to the tip apex as possible. In the case of microfabricated probes, at least the side of the cantilever facing the sample should be shielded.