Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10672994 | CIRP Annals - Manufacturing Technology | 2010 | 4 Pages |
Abstract
This paper presents the design of a monocular three-dimensional artificial vision system attached to a 20Ã microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method - along one direction (in steps of 100Â nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200Â nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner.
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
M. Lanzetta, M.L. Culpepper,