Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10673053 | CIRP Annals - Manufacturing Technology | 2010 | 4 Pages |
Abstract
The feasibility of using a dual coating system consisting of SiO2 and OTS-SAM thin films on the micro-machining characteristics of silicon wafer were investigated with the aim to eliminate the formation of undesirable hillocks. The outermost OTS-SAM coating was used as a sacrificial layer to pattern the SiO2 film, which in turn served to pattern the silicon substrate. After selectively removing the OTS-SAM coating by micro-machining, HF and KOH chemical etching processes followed to remove the SiO2 layer and create patterns on the silicon substrate. By this process, groove patterns of about 1 μm width could be successfully fabricated on a silicon wafer without the formation of undesirable hillocks.
Keywords
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Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
T-S. Oh, H-J. Kim, D-E. Kim,