Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10673148 | CIRP Annals - Manufacturing Technology | 2012 | 4 Pages |
Abstract
In a wide range of technological and biomedical applications nanostructured surfaces become increasingly important. Laser based techniques utilizing near-field focusing of pulsed laser radiation by microsphere particles allow a robust, low-cost nanopatterning at sub-diffraction-limited resolution. In combination with optical tweezers a direct-write nanostructuring becomes feasible. In this contribution, a fundamental simulational study of optical trap assisted ultrafast direct-write near-field nanostructuring showing the influence of the main process parameters is presented.
Keywords
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Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Karl-Heinz Leitz, Ulf Quentin, Ilya Alexeev, Michael Schmidt,