Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10673186 | CIRP Annals - Manufacturing Technology | 2012 | 4 Pages |
Abstract
Achieving 6D direct drive motion control over long planar strokes on a single mover can greatly improve machine performance. Existing solutions are either limited to small-stroke applications (a fraction of the stage size) or require a large number of coils with enormous control complexity. This paper presents a novel 6D direct drive technology for planar stages with many advantages: (1) stroke can be on the order of several meters; (2) the number of coils increases linearly with motion range; (3) no end effects or force coupling between axes; and (4) ease of control and superior force linearity.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Xiaodong Lu, Irfan-ur-rab Usman,