| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10673337 | CIRP Annals - Manufacturing Technology | 2015 | 4 Pages |
Abstract
The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.
Keywords
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Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Yasuhiro Kakinuma, Shunya Azami, Takasumi Tanabe,