Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10673575 | CIRP Annals - Manufacturing Technology | 2008 | 4 Pages |
Abstract
Recently, a repeatable and scalable nanoscale electro-machining (nano-EM) process to produce sub-20Â nm scale features has been demonstrated. In the presented research, the behavior of the liquid dielectric (n-decane) machining medium in nano-confinement (<3Â nm) under physical boundary conditions is investigated using molecular dynamics (MD) simulation. Results show a four-fold increase in the density of n-decane indicating 'quasi-solid' behavior at the nano-EM interface, thereby acting as an effective charge transport medium between the nano-tool and the workpiece. The effect of such quasi-solid medium is demonstrated through the experimental observations of electrical breakdown (BD) at the sub-20Â nm scale interface.
Related Topics
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Authors
V. Kalyanasundaram, K.R. Virwani, D.E. Spearot, A.P. Malshe, K.P. Rajurkar,