Improvement of Machining Accuracy of 5-Axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing

Air bearings are often used in ultraprecision machine tools requiring high accuracy. With increasing the high accuracy for machine tools, it is required to pay attention to microvibration with nanometer order. The fluctuation in compressed air applied to air bearings causes the air turbulence, which results in the microvibration. The study presents the laminarization by the optimal design of piping and air bearing surfaces as well as mirror surface finishing, so that the laminarization can be realized to suppress the microvibration. From experimental results, it is found that the surface roughness of workpieces can be drastically improved by using a revised ultraprecision machining center.