Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10674579 | CIRP Annals - Manufacturing Technology | 2007 | 4 Pages |
Abstract
To address the need to produce sub-50Â nm scale features for manufacturing of nano/bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (â¼20Â nm after in comparison with â¼35Â nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
K.R. Virwani, A.P. Malshe, K.P. Rajurkar,