Understanding Dielectric Breakdown and Related Tool Wear Characteristics in Nanoscale Electro-Machining Process

To address the need to produce sub-50 nm scale features for manufacturing of nano/bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (∼20 nm after in comparison with ∼35 nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.