Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10674648 | CIRP Annals - Manufacturing Technology | 2007 | 4 Pages |
Abstract
The importance of nano-machining processes is continually increasing in a wide range of industries. In particular, the demands for machining with stable nanometer order accuracy in a wide work area have recently increased in the electronics and automotive industries. In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this study, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The results of actual machining tests confirmed that the developed table system has a remarkable performance.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
H. Shinno, H. Yoshioka, K. Taniguchi,