Article ID Journal Published Year Pages File Type
10674687 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2011 4 Pages PDF
Abstract
The implementation of computed tomography on the nanobeam line of CENBG has required a careful design of the analysis chamber, especially microscopes for precise sample visualization, and detectors for scanning transmission ion microscopy (STIM) and for particle induced X-ray emission (PIXE). The sample can be precisely positioned in the three directions X, Y, Z and a stepper motor coupled to a goniometer ensures the rotational motion. First images of 3D tomography were obtained on a reference sample containing microspheres of certified diameter, showing the good stability of the beam and the sample stage, and the precision of the motion.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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