| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10674767 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 4 Pages |
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
D. Kaji, K. Morimoto, N. Sato, A. Yoneda, K. Morita,