Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10674854 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2011 | 5 Pages |
Abstract
Molecular dynamics computer simulations are employed to probe processes taking place during continuous irradiation of Ag(1Â 1Â 1) surface by keV Ar872 projectiles. Surface modification, the total sputtering yield, and the angular distributions of ejected species are calculated at fluences ranging from 0 up to â¼6Â ÃÂ 1013Â impacts/cm2. It has been shown that two trends can be identified in the development of surface roughness. At the beginning surface roughness increases fast. This fast increase terminates around 1Â ÃÂ 1013Â impacts/cm2 and is followed by a slow increase that finally saturates. The effect of the surface roughness on the sputtering yield depends on the impact angle. At normal incidence the sputtering yield is rather insensitive to the development of the surface topography. Modification of the surface morphology has, however, a significant influence on the total sputtering yield at large impact angles. Both the shape of the sputtering yield dependence on the impact angle and the angular spectra of ejected particles are sensitive to the surface roughness.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Lukasz Rzeznik, Robert Paruch, Barbara J. Garrison, Zbigniew Postawa,