Article ID Journal Published Year Pages File Type
10674857 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2011 4 Pages PDF
Abstract
Molecular dynamics simulation of Cu cluster sputtering by 50-200 eV/atom Cu2 dimers and Cu single atoms has been performed. The clusters were located on a (0 0 0 1) graphite surface and consisted of 13-195 atoms. Synergy features were identified in the sputtering yield and energy distributions of sputtered particles calculated for the cases of cluster bombardment with Cu dimers and monomers at the same velocity. The reason for the nonlinear effects in surface cluster sputtering is the overlapping of collision cascades generated by each of the dimer atoms.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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