Differential cross-section of the D(3He, p)4He nuclear reaction and depth profiling of deuterium up to large depths

The differential D(3He, p)4He reaction cross-section was determined at a laboratory angle of 135° for 3He energies between 0.5 and 6 MeV. Deuterium depth profiles are determined from the measurement of the proton yield as a function of incident 3He energy with following deconvolution of the obtained yield function. This allows deuterium depth profiling to very large depths. Deuterium depth profiling to a depth of 7 μm in W and 50 μm in B4C is demonstrated. The accuracy of the method is discussed.