Article ID Journal Published Year Pages File Type
10675821 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 17 Pages PDF
Abstract
Once focused, the ion beam in a microprobe can be scanned over the sample by using a set of two orthogonal magnetic coils or electrostatic deflection plates positioned before, inside or after the focusing system. In the paper the influence of the scanner position on the beam spot shape is considered for different focusing systems such as triplet, quadruplet and sextuplet and for two different emittances of the beam. The numerous graphs show the dependence of the shape of the spot and the density distribution of the beam on the scanning radius.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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